AVS 57th International Symposium & Exhibition
    MEMS and NEMS Friday Sessions
       Session MN-FrM

Paper MN-FrM6
Nanotribological Studies of Adaptive Optics Sliding Components in Microprojectors

Friday, October 22, 2010, 10:00 am, Room Santo Domingo

Session: Characterization for MEMS and NEMS
Presenter: H. Lee, The Ohio State University
Authors: B. Bhushan, The Ohio State University
H. Lee, The Ohio State University
S. Chaparala, Corning Incorporated
V. Bhatia, Corning Incorporated
Correspondent: Click to Email
As portable devices are increasingly developed and used, the size of their displays are getting smaller, therefore becoming harder to view. Integrated micro-projectors are an alternative way to see a big image on any surface chosen by users. Microprojectors require red, blue, and green lasers to perform. However, unfortunately the green laser is not commercially available. In order to generate the green laser, frequency doubling technique is used, doubling a semiconductor laser of a wavelength 1060nm to 530nm green laser. The best alignment of the lenses in frequency doubling technique effects on energy efficiency and performance of the devices. To align the lenses, there are reciprocating and stick-slip motions between the components in the devices. Therefore, nanotribological studies of adaptive optics sliding components in microprojectors are needed. In this study, a methodology to measure lubricant thickness and distribution is developed. Lubricant bonding techniques are identified to bond the lubricant to the surfaces with thermal, UV or plasma treatments. Friction, adhesion and wear mechanisms of lubricant on the sliding components are studied in various environments, such as different humidity and temperature.