AVS 57th International Symposium & Exhibition
    Applied Surface Science Wednesday Sessions
       Session AS-WeM

Paper AS-WeM4
Material Contrast Mechanisms in FIB and SEM Images

Wednesday, October 20, 2010, 9:00 am, Room Cochiti

Session: New Ion Beam Technologies for Imaging, Sample Preparation and Analysis
Presenter: L.A. Giannuzzi, FEI Company
Authors: L.A. Giannuzzi, FEI Company
M. Utlaut, Portland State University
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The relative contrast of both FIB and SEM images in metals yield a non-monotonic function with target atomic number. Material contrast from FIB images is similar to the material contrast observed from SEM images, with differences that can be directly attributed to particle-solid interaction theory. The non-monotonic particle stopping power and the sputter yield (for those particles that cause sputtering) are directly responsible for material contrast. The term “Z-contrast” is shown to have a different meaning than universally understood.