AVS 56th International Symposium & Exhibition
    Plasma Science and Technology Wednesday Sessions
       Session PS2+TF-WeM

Paper PS2+TF-WeM1
Plasma Polymerization of bis-1, 2-(triethoxysilyl) Ethane (BTSE): Interfacial Characterization by ToF-SIMS and XPS

Wednesday, November 11, 2009, 8:00 am, Room B2

Session: Plasma Deposition and Plasma-assisted ALD
Presenter: A. Batan, Univ. Libre de Bruxelles, Facultés Univ. Notre-Dame de la Paix, Belgium
Authors: A. Batan, Univ. Libre de Bruxelles, Facultés Univ. Notre-Dame de la Paix, Belgium
N. Mine, Facultés Univ. Notre-Dame de la Paix, Belgium
B. Douhard, Facultés Univ. Notre-Dame de la Paix, Belgium
F. Brusciotti, Vrije Univ. Brussel, Belgium
I. De Graeve, Vrije Univ. Brussel, Belgium
J. Vereecken, Vrije Univ. Brussel, Belgium
M. Wenkin, Coating Research Inst., Belgium
M. Piens, Coating Research Inst., Belgium
H. Terryn, Vrije Univ. Brussel, Belgium
J.J. Pireaux, Facultés Univ. Notre-Dame de la Paix, Belgium
F. Reniers, Univ. Libre de Bruxelles, Belgium
Correspondent: Click to Email

Plasma polymerized BTSE films were deposited by vacuum and atmospheric plasma on aluminum (99.99%) substrate. Time-of-flight secondary ion mass spectrometry (ToF-SIMS) has been used for probing the metal/film interface. Ion etching by Xe+ 500 eV and 250 eV, depending on the plasma polymer BTSE film thickness, exposed the interfacial region, while Ga+ (15 keV) ions analysed the material composition.
An AlOSi+fragment was identified at nominal mass m/z = 70.9539 amu in high mass resolution spectra. The presence of this aluminium-oxygen-silicon ion fragment is a strong indication of an existing chemical interaction between the plasma polymer BTSE film and the aluminum substrate: the nature of this interaction implies the formation of a covalent bond between the silane and the aluminum substrate. Until now, this strong interaction silane-aluminum has never been observed in plasma polymer BTSE films.
Ageing tests combined with X-ray photoelectron spectroscopy measurements allowed the evaluation of the adhesion performance of plasma polymerized BTSE films on aluminum. The Si2p signal intensity was measured before and after dipping the coated sample in an ultrasonic water bath for 30 min, at room temperature. The Si2p peak intensity remained constant after the sonication test, showing a strong adhesion between the deposited layer and the aluminum substrate.
  
Acknowledgements
The project partners VUB, ULB, FUNDP and CoRI gratefully acknowledge the Belgian Science Policy for funding the FOMOS project (P2/00/04) in the “Programme to stimulate knowledge transfer in areas of strategic importance”. www.belspo.be