AVS 56th International Symposium & Exhibition | |
Plasma Science and Technology | Wednesday Sessions |
Session PS2+TF-WeM |
Session: | Plasma Deposition and Plasma-assisted ALD |
Presenter: | A. Batan, Univ. Libre de Bruxelles, Facultés Univ. Notre-Dame de la Paix, Belgium |
Authors: | A. Batan, Univ. Libre de Bruxelles, Facultés Univ. Notre-Dame de la Paix, Belgium N. Mine, Facultés Univ. Notre-Dame de la Paix, Belgium B. Douhard, Facultés Univ. Notre-Dame de la Paix, Belgium F. Brusciotti, Vrije Univ. Brussel, Belgium I. De Graeve, Vrije Univ. Brussel, Belgium J. Vereecken, Vrije Univ. Brussel, Belgium M. Wenkin, Coating Research Inst., Belgium M. Piens, Coating Research Inst., Belgium H. Terryn, Vrije Univ. Brussel, Belgium J.J. Pireaux, Facultés Univ. Notre-Dame de la Paix, Belgium F. Reniers, Univ. Libre de Bruxelles, Belgium |
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