| AVS 56th International Symposium & Exhibition | |
| Applied Surface Science | Wednesday Sessions |
| Session AS-WeM |
| Session: | Electron Spectroscopies |
| Presenter: | M. Maier, Omicron NanoTechnology GmbH, Germany |
| Authors: | K. Winkler, Omicron NanoTechnology GmbH, Germany M. Maier, Omicron NanoTechnology GmbH, Germany M.E. Escher, Focus GmbH, Germany B. Kroemker, Omicron NanoTechnology GmbH, Germany D. Funnemann, Omicron NanoTechnology GmbH, Germany |
| Correspondent: | Click to Email |
Photoelectron emission microscopy (PEEM) in combination with a high-resolution energy filter (ΔE in the 100meV regime)[1] is a non-destructive and versatile surface characterisation technique with the ability to solve upcoming scientific metrology issues [2].
Looking at the Roadmap for Semiconductors today, scaling down of devices faces growing complexity of the related issues. To overcome these issues often requires detailed analysis at a local scale where understanding of materials in the form of small objects or patterns is of great importance. Hence the need for new spatially-resolved, non-destructive and comprehensive analysis tools becomes clear.
To identify the chemical compounds in a local sample area, energy-filtered PEEM is a very valuable metrology tool combining high spatial resolution with high-resolution spectroscopy. Continuous improvements of PEEM instruments nowadays enable local nano-spectroscopy with the highest lateral resolution in convenient laboratory conditions [3]. Imaging XPS with unsurpassed lateral resolution and quantitative analysis of the local work function allow for a detailed understanding of the surface chemistry, including locally resolved doping effects [4] on small structures used for semiconductor devices and even smaller silicon nano-wires[5].
In addition, recent experiments have shown the feasibility for a new class of experiments for band structure analysis. Advanced spectroscopic PEEM instruments allow a new approach to analyse the electronic structures of samples. Thus band structure mapping with a large acceptance angle of ±90° without the need for eucentric sample rotation becomes possible [6]. Together with full control over the analysed local area, the technique is ideally suited to investigate the electronic properties of single grains or small devices. Hence, this method opens up the path to a new class of experiments allowing e.g. dedicated local band structure tailoring.
1. M. Escher et al. J. Electron. Spectrosc. Relat. Phenom. 144 (47), pp. 1179-1182 (2005).
2. M. Senoner et al. Jurnal of Surface Analysis 12, pp 78-82 (2005).
3. O. Renault et al., Surface Science. 601, pp 4727 - 4732(2007).
4. N. Barrett et al. submittet to J Phys Condens Matter (2008) .
5. A. Bailly et al. Nano Lett., 8 (11), pp 3709–3714 (2008).
6. B. Krömker et al. Rev Sci Instrum. 79, 053702 (2008).