AVS 53rd International Symposium
    Thin Film Thursday Sessions

Session TF-ThM
Fundamentals in Thin Film Deposition

Thursday, November 16, 2006, 8:00 am, Room 2022
Moderator: M.C.M. Van De Sanden, Eindhoven University of Technology, The Netherlands


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Click a paper to see the details. Presenters are shown in bold type.

8:00am TF-ThM1
Tilted Fiber Texture in Aluminum Nitride Thin Films
J.M.E. Harper, D. Deniz, University of New Hampshire, J.W. Hoehn, F. Chen, Seagate Technology Inc.
8:20am TF-ThM2
CVD of Titanium Diboride using Single Source Precursor
N. Kumar, Y. Yang, W. Noh, G. Girolami, J. Abelson, University of Illinois Urbana-Champaign
8:40am TF-ThM3 Invited Paper
Fundamentals in Thin Film Pulsed Laser Deposition: Growth Control at an Atomic Level
D.H.A. Blank, University of Twente and MESA+ Institute for Nanotechnology, The Netherlands
9:20am TF-ThM5
Solvation Effects in the Kinetics of Supercritical CO@sub 2@ Based Deposition of Metal Oxide Thin Films
Q. Peng, K.J. Park, D. Hojo, D. Barua, G.N. Parsons, North Carolina State University
9:40am TF-ThM6
Formation of c-Si/a-Si:H Interfaces Studied by Real-Time Second-Harmonic Generation, Spectroscopic Ellipsometry, and Infrared Spectroscopy
J.J.H. Gielis, P.J. van den Oever, B. Hoex, M.C.M. Van De Sanden, W.M.M. Kessels, Eindhoven University of Technology, The Netherlands
10:00am TF-ThM7
Kinetic Pathways Leading to Layer-By-Layer Growth: A Multibllion Time-Step Molecular Dynamics Study
V. Chirita, D. Adamovic, E.P. Münger, L. Hultman, Linköping University, Sweden, J.E. Greene, University of Illinois, Urbana
10:20am TF-ThM8
Interpretation of the Roughness in Au(111) Polycrystalline Films
E. Rodriguez-Canas, Instituto de Ciencia de Materiales de Madrid (CSIC), Spain, J.A. Aznarez, Instituto de Fisica Aplicada (CSIC), Spain, E. Vasco, J.L. Sacedon, Instituto de Ciencia de Materiales de Madrid (CSIC), Spain