AVS 53rd International Symposium | |
Thin Film | Thursday Sessions |
Session TF-ThM |
Session: | Fundamentals in Thin Film Deposition |
Presenter: | V. Chirita, Linköping University, Sweden |
Authors: | V. Chirita, Linköping University, Sweden D. Adamovic, Linköping University, Sweden E.P. Münger, Linköping University, Sweden L. Hultman, Linköping University, Sweden J.E. Greene, University of Illinois, Urbana |
Correspondent: | Click to Email |