| AVS 53rd International Symposium | |
| MEMS and NEMS | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | MN-TuM1 Invited Paper Controlled Fabrication of Nanotube Devices using Nanotubes of Known (n,m) Indices J. Hone, Columbia University |
| 8:40am | MN-TuM3 Compensation of Strain Gradient by Varying Dopant Profile during the Growth of Polycrystalline Silicon Carbide Films J. Zhang, University of California, Berkeley, R. Howe, Stanford University, R. Maboudian, University of California, Berkeley |
| 9:00am | MN-TuM4 Characterization of APCVD and LPCVD Based Polycrystalline 3C-Silicon Carbide Resonators W.C. Chang, C. Zorman, M. Mehregany, Case Western Reserve University |
| 9:20am | MN-TuM5 NEMS and AFM Cantilevers Synthesized from Metal Nanocomposites C. Ophus, Univ. of Alberta, Canada, Z. Lee, NCEM, Lawrence Berkeley National Lab, E. Luber, N. Nelson-Fitzpatrick, R. Mohammadi, C. Gilkison, L.M. Fischer, S. Evoy, Univ. of Alberta, Canada, V. Radmilovic, U. Dahmen, NCEM, Lawrence Berkeley National Lab, D. Mitlin, Univ. of Alberta, Canada |
| 10:40am | MN-TuM9 Invited Paper Gray-scale Technology for 3-D Static and Dynamic MEMS R. Ghodssi, University of Maryland |
| 11:20am | MN-TuM11 Effects of Tensile Stress and Viscous Damping on the Resonance of Nanomechanical Beams and Cantilevers S.S. Verbridge, L.M. Bellan, R.B. Reichenbach, J.M. Parpia, H.G. Craighead, Cornell University |
| 11:40am | MN-TuM12 Piezoelectric-Diamond Hybrid Heterostructures for High Performance MEMS/NEMS Devices S. Srinivasan, J. Hiller, O. Auciello, A.V. Sumant, Argonne National Laboratory |