AVS 53rd International Symposium
    Thin Film Tuesday Sessions
       Session TF-TuP

Paper TF-TuP21
Heat Treatment Effect in Palladium Oxide Composite Films Fabricated by Reactive Ion Beam Sputter-Deposition

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Thin Film Poster Session
Presenter: T. Ichinohe, Tokyo National College of Technology, Japan
Authors: T. Ichinohe, Tokyo National College of Technology, Japan
S. Masaki, Tokyo National College of Technology, Japan
M. Iwase, Tokai University, Japan
K. Kawasaki, TDY, Co, Ltd., Japan
Correspondent: Click to Email
In this study, palladium (Pd) oxide composite films containing metal Pd were fabricated by reactive ion beam sputter-deposition, changing the substrate temperature (T@sub sub@) from RT to 400@super o@C. According to X-ray diffraction analyses, the mixture of PdO(002) and Pd(111) was observed in the film formed at T@sub sub@=200@super o@C, on the other hand, only a metal Pd structure was observed in the film formed at T@sub sub@=400@super o@C. The samples formed at T@sub sub@=200@super o@C and at 400@super o@C showed positive type conduction with a resistivity of 4x10@super -4@ @ohm@cm and negative type with 3x10@super -5@ @ohm@cm in as-deposition, respectively. The structure of both samples obviously changed to PdO(002), the resistivity also increasing up when the samples were oxidized over 400@super o@C. After oxidation at 600@super o@C, both samples showed p type conduction and relatively higher resistivity (1x10@super -2@ @ohm@cm). The absorption edge changed from 1.5 to 2.3 eV after oxidation up to 600@super o@C. On the contrary, the structure and the resistivity of T@sub sub@=200@super o@C and 400@super o@C almost did not change when the samples were annealed under nitrogen atmosphere, except at 600@super o@C in T@sub sub@=200@super o@C. The resistivity in the sample of T@sub sub@=200@super o@C slightly decreased after annealing at lower temperature than 600@super o@C and increased to very large value as same as insulator over 600@super o@C. The absorption edge was too high to measure in the insulating sample. This seemed to indicate that the sample changed to palladium nitride at 600@super o@C.