AVS 53rd International Symposium
    Thin Film Tuesday Sessions
       Session TF-TuP

Paper TF-TuP15
Nano-Composite Amorphous Carbon (a-C) Thin Films to Improve the Tribological Properties

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Thin Film Poster Session
Presenter: Y.S. Park, Sungkyunkwan University, Korea
Authors: Y.S. Park, Sungkyunkwan University, Korea
H.J. Cho, Sungkyunkwan University, Korea
B. Hong, Sungkyunkwan University, Korea
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In this work, we studied the change in the tribological properties of amorphous carbon deposited over Si substrate with Ti and a-C:Ti as the adhesive layer. The nano-composite amorphous carbon thin films were prepared by closed-field unbalanced magnetron sputtering method using the graphite and the titanium as targets. We tried various structure for the interlayer under hydrogenated amorphous carbon (a-C:H) film to improve the tribological properties and have observed characteristic changes in the nano-composite structure. In addition, Ti layer (a-C:H/Ti/Si and a-C:H/a-C:Ti/Si) improved the adhesion between the a-C:H film and the substrate and the incorporation of the Ti (a-C:Ti and a-C:H:Ti) in a-C and a-C:H films improved the lubricant properties. We selected the laminated structure in order to minimize the demerits observed in a-C:H/Ti/Si and a-C:H/a-C:Ti/Si structures, such as low hardness and high stress. With Ti-doped a-C and a-C:H in laminated structure, the tribological properties were observed to be improved with high hardness over 29 GPa, high elastic modulus over 235 GPa and a smooth surface below 0.8 nm.