AVS 53rd International Symposium
    Nanometer-scale Science and Technology Friday Sessions
       Session NS-FrM

Paper NS-FrM11
Fabrication of Tin Oxide Nanowires Based Nano-Micro Sensor for Room Temperature Hydrogen Detection

Friday, November 17, 2006, 11:20 am, Room 2016

Session: Nanowires
Presenter: S. Deshpande, University of Central Florida
Authors: S. Deshpande, University of Central Florida
A. Karakoti, University of Central Florida
G. Londe, University of Central Florida
H.J. Cho, University of Central Florida
S. Seal, University of Central Florida
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Randomly oriented tin oxide nanowires, with diameters on the order of 100 nm, were grown on Si substrate using thermal evaporation technique. The thermodynamic and kinetic factors leading to the evolution of tin oxide nanowires from vapor solid transformation during the process is evaluated. These nanowires were successfully incorporated into micro-electro-mechanical (MEMS) device. Hydrogen (H2) at ppm-level has been successfully detected at room temperature using the present 1- dimensional tin oxide based MEMS sensor. The device showed rapid and reversible resistance changes upon periodic exposure to hydrogen gas (less than 900ppm concentration). The one dimensional geometry of tin oxide is responsible for the device response. Effect of aspect ratio of the nanowires on diffusion of hydrogen molecules in the tin oxide nanowires, effect of catalyst adsorption on nanowire surface and corresponding effect on sensor properties has been studied in detail.