AVS 53rd International Symposium | |
Nanometer-scale Science and Technology | Wednesday Sessions |
Session NS+NM-WeA |
Session: | Nanolithography and Patterning |
Presenter: | P.E. Sheehan, Naval Research Laboratory |
Authors: | P.E. Sheehan, Naval Research Laboratory M. Yang, Naval Research Laboratory A.R. Laracuent, Naval Research Laboratory B.A. Nelson, Georgia Tech W.P. King, Georgia Tech L.J. Whitman, Naval Research Laboratory |
Correspondent: | Click to Email |