| AVS 53rd International Symposium | |
| Nanometer-scale Science and Technology | Wednesday Sessions |
| Session NS+NM-WeA |
| Session: | Nanolithography and Patterning |
| Presenter: | P.E. Sheehan, Naval Research Laboratory |
| Authors: | P.E. Sheehan, Naval Research Laboratory M. Yang, Naval Research Laboratory A.R. Laracuent, Naval Research Laboratory B.A. Nelson, Georgia Tech W.P. King, Georgia Tech L.J. Whitman, Naval Research Laboratory |
| Correspondent: | Click to Email |