AVS 53rd International Symposium
    Nano-Manufacturing Topical Conference Tuesday Sessions
       Session NM-TuP

Paper NM-TuP3
High-K HfO@sub 2@ Nanotube Fabrication using Template Synthesis and Atomic Layer Deposition

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Nano-Manufacturing Poster Session
Presenter: I. Perez, University of Maryland, College Park
Authors: I. Perez, University of Maryland, College Park
E. Robertson, University of Maryland, College Park
L. Henn-Lecordier, University of Maryland, College Park
H. Yi, University of Maryland, College Park
S.J. Son, University of Maryland, College Park
S.B. Lee, University of Maryland, College Park
G.W. Rubloff, University of Maryland, College Park
Correspondent: Click to Email
In a template synthesis approach, we have exploited self-assembly which occurs during the anodic oxidation of aluminum to produce anodic aluminum oxide (AAO) membranes with high densities of cylindrical nanopores with uniform dimensions and spacing. The high aspect ratio of the pores (up to 1000:1), their nanoscale dimensions (diameters 15-100 nm), and their large area density (~10@super 11@ pores per cm@super 2@) suggest diverse applications, from nanowire and nanotube structure fabrication to gas and chemical separations, electronic nanocomponents, and nano-energy products. To achieve more precise control of nanostructure fabrication on AAO membrane templates, we have applied atomic layer deposition (ALD) to produce high-K HfO@sub 2@ nanotubes in AAO templates, which serve as scaffolds for nanofabrication of nanotubes. We then release the HfO@sub 2@ nanotubes by dissolution of the alumina template. TEM shows the HfO@sub 2@ nanotubes to have wall thicknesses 3-5 nm and lengths 2.5-3.5 µm. ALD employs alternating reactant exposures and essentially self-limiting adsorption/reaction of organometallic precursors and oxidants to achieve atomic-scale control of deposited films. With self-assembly and self-limiting reaction dominating the template and nanotube fabrication steps, this combination appears attractive to meet the future demands of nanotube manufacturing.@footnote 1@ @FootnoteText@ @footnote 1@Sponsored in part by the Laboratory for Physical Sciences.