Two issues that are critical, and projected to be limiting, to next generation device technology are metrology at the nanoscale and integration of diverse materials into manufactured devices. The first half of this talk will summarize advances in local measurements of properties and demonstrate new techniques that probe electronic structure and properties in nanostructures and molecular wires. These approaches will be illustrated on 3-terminal configurations that exhibit transistor or memory behavior. Opportunities for exciting advances on the horizon will be presented. The second half of the talk will present strategies for integrating a combination of metal and/or oxide nanoparticles, organic and/or biological molecules on oxide or polymeric substrates in device configurations. The processing approach, Ferroelectric Nano Lithography, induces variations in local electronic structure in substrates to direct assembly of nanostructures with diverse properties into complex patterns, thus overcoming one of the limitations of self assembly. The approach has been used to produce a molecular opto electronic switch.