AVS 53rd International Symposium
    Exhibitor Workshop Tuesday Sessions
       Session EW-TuL

Paper EW-TuL5
BOCCT Magnet Retrofit Assemblies

Tuesday, November 14, 2006, 1:40 pm, Room Exhibit Hall

Session: Exhibitor Workshop
Presenter: J. Hrebik, Angstrom Sciences, Inc.
Authors: M. Bernick, Angstrom Sciences, Inc.
J. Hrebik, Angstrom Sciences, Inc.
Correspondent: Click to Email
Angstrom Sciences, Inc. has optimized a high-performance magnet retrofit assembly for BOCCT-HRC magnetron assemblies to improve target utilization over existing designs. As a magnetron sputtering cathode ages and the machine’s efficiency declines, a decision to either replace or repair the equipment becomes necessary. However, cost effectiveness in production is vital to maintaining a competitive edge in the marketplace. Angstrom Sciences’ BOCCT-HRC retrofit offers a solution, dramatically improving target utilization over the existing design without changing process parameters and ultimately maximizing ROI.