AVS 53rd International Symposium
    Exhibitor Workshop Tuesday Sessions
       Session EW-TuL

Paper EW-TuL2
Advantages of the Delay-Line Dector for XPS Imaging

Tuesday, November 14, 2006, 12:40 pm, Room Exhibit Hall

Session: Exhibitor Workshop
Presenter: C. Blomfield, Kratos Analytical
Authors: D. Surman, Kratos Analytical
C. Blomfield, Kratos Analytical
S. Page, Kratos Analytical
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The delay-line detector, comprising a multi-channel plate stack above a delay-line anode, is used for photoelectron detection in both spectroscopy and imaging mode. With over 100 detector channels the DLD can also be use to acquire unscanned or 'snapshot' small spot spectra in a matter of seconds. Genuine pulse counting in 2D imaging mode means that quantitative parallel images can be generated to allow greater insight into the lateral distribution of chemical species at the surface. The ability to obtain a fast parallel chemical image which can be used as a reference to perform spectroscopic analysis is an integral part of the AXIS XPS instruments. The incorporated electrostatic deflection system allows easy multi-point analysis to be carried out from within the imaged field of view. The real time imaging capability of the Axis intruments reduce sample setup time and significantly reduces the image acquisition time. This ultimately leads to improved data quality and a greater sample throughput.