AVS 53rd International Symposium
    Electronic Materials and Processing Thursday Sessions
       Session EM-ThP

Paper EM-ThP54
Electrical Properties of Organic Light Emitting Diodes by Indium Tin Oxide-Chemical Mechanical Polishing Process

Thursday, November 16, 2006, 5:30 pm, Room 3rd Floor Lobby

Session: Electronic Materials and Processing Poster Session
Presenter: W.-S. Lee, Chosun University, Korea
Authors: G.-W. Choi, Chosun University, Korea
W.-S. Lee, Chosun University, Korea
Y.J. Seo, Daebul University, Korea
Y.-K. Jun, Chosun University, Korea
Correspondent: Click to Email
Indium tin oxide (ITO) thin film is a transparent electrode, which is widely applied to solar battery, illuminators, optical switches, liquid crystal displays (LCDs), plasma display panels (PDPs), and organic light emitting displays (OLEDs) due to its easy formation on glass substrates, good optical transmittance, and good conductivity. However, some problems such as peaks, bumps, large particles, and pin-holes on the surface of ITO thin film were reported, which caused the destruction of color quality, the reduction of device life time, and short-circuit. Chemical mechanical polishing (CMP) process is one of the suitable solutions, which could solve the problems. CMP performances can be optimized by several CMP components such as equipment and consumables. In this study, the optimum process parameters and the influences of process parameters were investigated for ITO-CMP with the sufficient removal rate and the good planarity. In this work, we studied the electrical characteristics of OLED with the structure of glass/ITO/MEH-PPV/Al using polished ITO surface as a bottom electrode (anode). And then, the optical property such as transmittance and absorption efficiency were discussed in order to evaluate the possibility of CMP application for ITO film.