AVS 53rd International Symposium
    Applied Surface Science Thursday Sessions
       Session AS-ThP

Paper AS-ThP10
Application of a Recent Algorithm to Patterned Polymer Overlayers

Thursday, November 16, 2006, 5:30 pm, Room 3rd Floor Lobby

Session: Aspects of Applied Surface Science Poster Session
Presenter: S.J. Coultas, Kratos Analytical Ltd, UK
Authors: S. Hajati, University of Southern Denmark
S. Tougaard, University of Southern Denmark
S.J. Coultas, Kratos Analytical Ltd, UK
C. Blomfield, Kratos Analytical Ltd, UK
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Initial studies have shown the potential of a recent algorithm@footnote 1@ for the processing of XPS image data.@footnote 2@ The algorithm lends itself to automated data processing, essential for the practial analysis of XPS images. Application of the algorithm determines both the total amount of atoms within the outmost 3 inelastic mean freee paths and an estimation of their depth distribution. In this work we extend the application of the algorithm to a series of samples with overlayers of known thicknesses to produce a more accurate indication of the depth distribution. The resultant images show both the amount and depth distribution of each element. We also look at ways of streamlining the data acquisition to develop this in to a practical technique for producing thickness maps. @FootnoteText@ @footnote 1@ S. Tougaard, J. Vac. Sci. Technol. A21, 1081 (2003)@footnote 2@ S. Hajati, S. Coultas, C. Blomfield, S. Tougaard, Surf. Sci. (2006).