| AVS 52nd International Symposium | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MN-MoM1 Mechanical Properties of Polysilicon Thin Films using Micromachined Membranes and a Design of Experiments Methodology A.J. Fleischman, A. Dubnisheva, R.S. Butler, The Cleveland Clinic Foundation, R. Rosenblum, C.A. Zorman, Case Western Reserve University, S. Roy, The Cleveland Clinic Foundation |
| 8:40am | MN-MoM2 Characterization of Nanoscale Wear Processes in Polysilicon-Based MEMS Devices using AFM and PEEM-NEXAFS Spectromicroscopy A.V. Sumant, D.S. Grierson, G. Wabiszewski, R.W. Carpick, University of Wisconsin at Madison, A. Corwin, M. De Boer, Sandia National Laboratories |
| 9:00am | MN-MoM3 Invited Paper Science and Technology of Ultrananocrystalline Diamond Thin Films and Their Integration for Fabrication of Advanced MEMS/NEMS O. Auciello, Argonne National Lab, J. Birrell, Presently with Advanced Diamond Technologies, J.A. Carlisle, Argonne National Lab, K.-H. Kim, B. Peng, H.D. Espinosa, Northwestern Univ., A.V. Sumant, D.S. Grierson, N. Guoqing, R.W. Carpick, Univ. of Wisconsin-Madison |
| 9:40am | MN-MoM5 Quantitative Work-of-Adhesion Values for use as an In-Fab Monitor of Stiction E.J. Thoreson, Worcester Polytechnic Institute, J. Martin, Analog Devices, Inc., N.A. Burnham, Worcester Polytechnic Institute |
| 10:00am | MN-MoM6 An SPM-Based System for Contact Reliability Characterization L. Chen, N. McGruer, G. Adams, Northeastern University, R. Coutu, K. Leedy, Air Force Research Laboratory |
| 10:20am | MN-MoM7 Surface Chemistry of Organosilanes as a Vapor Phase Lubricant for Si-based MEMS Applications D. Kim, A.J. Gellman, Carnegie Mellon University |
| 10:40am | MN-MoM8 Post-Processing Curvature Modification of Cantilever Microbolometer Focal Plane Arrays S. Huang, X. Zhang, Boston University |
| 11:00am | MN-MoM9 Using Geometric Moiré to Measure the Deformation in Polymeric Nanostructures Y. Zhao, X. Zhang, Boston University |
| 11:20am | MN-MoM10 High Sensitivity and Broad Dynamic Range MEMS Humidity Sensor A. Zribi, W.-C. Tian, A. Knobloch, GE Global Research Center |
| 11:40am | MN-MoM11 Vacuum Packaging MEMS Devices R. Patel, M.U. Pralle, E.A. Johnson, A.C. Greenwald, Ion Optics, Inc. |