AVS 52nd International Symposium
    Vacuum Technology Wednesday Sessions
       Session VT-WeM

Paper VT-WeM7
A Comparison of Various Standards Proposed for the Measurement of the Speed of Sputter-ion Pumps

Wednesday, November 2, 2005, 10:20 am, Room 201

Session: Gas Flow and Pump Technology
Presenter: S.P. Clough, Gamma Vacuum, LLC
Correspondent: Click to Email

A detailed comparison is made of the recommended procedures and equipment for measuring the speeds of sputter-ion pumps as proffered by: i) the ISO in DRAFT INTERNATIONAL STANDARD ISO/DIS 3556-1,2 (1992); ii) the DEUTSCHE NORM Acceptance specification for sputter-ion pumps DIN 28 429 (1985); and, iii) the AVS Recommended procedure for measuring pumping speed, no number (1987). The purpose of this work is to: highlight the concurrences and disparities between the "standards", ii) suggest reasonable criterion relating to procedures and equipment; and, iii) propose a more global template for such measurements.