AVS 52nd International Symposium
    Vacuum Technology Wednesday Sessions
       Session VT-WeM

Paper VT-WeM10
Achieving Ultra High Vacuum By Backing Cascaded Turbo Pumps with NEG or Ion Pumps*

Wednesday, November 2, 2005, 11:20 am, Room 201

Session: Gas Flow and Pump Technology
Presenter: P. Adderley, Jefferson Lab
Authors: P. Adderley, Jefferson Lab
C. Day, Forschungszentrum, Karlsruhe
G.R. Myneni, Jefferson Lab
Correspondent: Click to Email
The scientific community requires contamination free pumping systems to achieve low ultimate pressures in order to maintain low working pressures in a process or given application. Even though the turbo molecular pumps are able to achieve pressures in the ~5.e-11 Torr range, there are several disadvantages including back streaming, vibrations, oil-laden bearings of the traditional backing pumps. In this paper we present alternative backing methods, which will eliminate the above problems. In addition we will report the achievement of UHV pressures with cascaded conventional turbo pumps backed by ion, traditional NEG or the new active NEG pumps. *This work was supported by U.S. Department of Energy Contract No. DE-AC05-84ER40150 and KATRIN International Collaboration at FZK in Germany.