AVS 52nd International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuA

Paper VT-TuA4
Development of a New High-Stability Transfer Standard Based on Resonant Silicon Gauges for the Range 0.1 kPa - 130 kPa

Tuesday, November 1, 2005, 3:00 pm, Room 200

Session: Calibration: Pressure and Flow Metrology
Presenter: J.H. Hendricks, NIST
Authors: J.H. Hendricks, NIST
A.P. Miiller, NIST
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The National Institute of Standards and Technology (NIST) has developed a new transfer standard capable of absolute-mode and differential-mode operation in the range 0.1 kPa to 130 kPa. The transfer standard is based on Resonant Silicon Gauges (RSGs) of the same type used to provide superior calibration stability in recent CCM Key Comparisons of absolute and differential pressure standards,@footnote1,2@ which covered pressures up to 1 kPa. The new NIST transfer standard consists of two 10-kPa RSGs, two 130-kPa RSGs, and an ion pump to provide a reference vacuum when making absolute pressure measurements. The pairs of RSGs provide redundancy but, more importantly, they enable Youden analyses to be applied to the data to identify systematic differences between pressure standards. The RSG transfer standard package has demonstrated good short term zero stability and pressure resolution over the 0.1 kPa to 130 kPa range, and has demonstrated long term instability of a few ppm at 130 kPa, increasing to 0.01% at 0.1 kPa. In terms of long term stability, the new NIST transfer standard package is nominally commensurate with piston gauges at pressures down to 10 kPa, and extends measurement capability down to 0.1 kPa. Although its intended use is for intra-laboratory comparisons of primary standards at NIST, this transfer standard may also find applications in international comparisons of pressure standards. @FootnoteText@ @footnote 1@ Miiller, A. P., Bergoglio, M., Bignell, N., Fen, K. M. K., Hong, S. S., Jousten, K., Mohan, P., Redgrave, F. J., and Sardi, M., Final report on key comparison CCM.P-K4 of absolute pressure standards from 1 Pa to 1000 Pa, Metrologia, 2002, 39, Tech. Suppl., 07001.@footnote 2@Miiller, A. P., Cignolo, G., Fitzgerald, M. P., and Perkin, M. P., Final report on key comparison CCM.P-K5 of differential pressure standards from 1 Pa to 1000 Pa, Metrologia, 2002, 39, Tech. Suppl., 07002.