AVS 52nd International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuA

Paper VT-TuA3
High-accuracy Vacuum Calibration System

Tuesday, November 1, 2005, 2:40 pm, Room 200

Session: Calibration: Pressure and Flow Metrology
Presenter: S. Tison, Mykrolis Corporation
Authors: S. Tison, Mykrolis Corporation
S. Lu, Mykrolis Corporation
S. Sukumaran, Mykrolis Corporation
Correspondent: Click to Email
Many industrial vacuum processes require high-accuracy vacuum measurements to enable process capabilities critical to the device attributes or performance. Semiconductor device manufacture, flat panel displays, optical coatings, and vacuum metalurgy are a few examples where vacuum measurements are critical to product performance. While these measurements are critical, there is a lack of high accuracy industrial calibration systems that can support these needs; particuarly at pressures below 100 Pa. A new vacuum calibration system has been developed for calibrating vacuum gages in the range of 1 Pa to 100 kPa with uncertainties ranging from +/-0.02% to +/-0.2% of reading. The paper describes this system which utilizes high stabilty transfer standards in conjunction with pressure expansion techniques to achieve reliable high-accuracy vacuum gage calibration and characterization. The data indicates that automated high accuracy vacuum measurements can be made with a single vacuum system utilizing transfer standards in conjunction with a "primary type" pressure expansion technique which relies on the known ratio of two calibrated volumes to achieve accuracies previously unachievable solely by utilizing vacuum transfer standards.