AVS 52nd International Symposium
    Thin Films Monday Sessions
       Session TF-MoP

Paper TF-MoP3
The Annealing Effect on the Diamond-Like Carbon Protective Antireflection Coating

Monday, October 31, 2005, 5:00 pm, Room Exhibit Hall C&D

Session: Aspects of Thin Films Poster Session
Presenter: W.S. Choi, Sungkyunkwan University, Korea
Authors: W.S. Choi, Sungkyunkwan University, Korea
K. Kim, Sungkyunkwan University, Korea
J. Yi, Sungkyunkwan University, Korea
B. Hong, Sungkyunkwan University, Korea
Correspondent: Click to Email
Diamond-like carbon (DLC) film has many advantages like diamond film beside it has wide band gaps and its refractive index can be adjusted variably so the film can be utilized as protective coating for IR windows and anti-reflective coating for solar cells. In this study, DLC films were prepared by RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane (CH4) and hydrogen (H2) gas. We examined the effects of the post annealing temperature and the annealing ambient on tribological and optical properties of the DLC films. The films were annealed from 300 to 900oC in steps of 200oC by RTA equipment in different ambient. The thickness of the film was observed by a scanning electron microscope (SEM) and surface profiler. The structure and surface morphology of the films were examined using Raman spectroscopy, X-ray diffractometer and atomic force microscopy. The hardness and depth profile of the DLC film were measured with nano-indentor and Auger electron spectroscopy, respectively. The optical properties of DLC thin film were investigated by UV/VIS spectrometer, Fourier transform infrared spectroscopy (FT-IR) and ellipsometry. And also, we have checked their carrier life time.