AVS 52nd International Symposium
    Nanometer-Scale Science and Technology Monday Sessions
       Session NS2-MoA

Paper NS2-MoA6
Nanometer-scale Structures Created using Molecular Self-Assembly for Building Blocks and Components

Monday, October 31, 2005, 3:40 pm, Room 210

Session: Nanometer Scale Assembly
Presenter: M.E. Anderson, The Pennsylvania State University
Authors: M.E. Anderson, The Pennsylvania State University
C. Srinivasan, The Pennsylvania State University
R. Jayaraman, The Pennsylvania State University
E.M. Carter, The Pennsylvania State University
M.W. Horn, The Pennsylvania State University
P.S. Weiss, The Pennsylvania State University
Correspondent: Click to Email
Molecular self-assembly plays an important role in the development of many nanolithographic techniques acting as building blocks and/or an active components for nanometer-scale devices. We have utilized self-assembled multilayers in conjunction with conventional lithography to create metal electrode structures with precise proximal placement in the 10-50 nm regime.@footnote 1-3@ By controlled placement and thickness of these multilayers (building blocks), the spacing between the electrodes can be fabricated with single nanometer resolution. Much effort has gone into developing the lithographic process steps to create precise nanometer-scale gaps reproducibly with electrical integrity.@footnote 4@ We will present methods relevant to the processing parameters and data regarding the electronic characterization of these nanogaps. The optimization of lithographic processes compatible with self-assembly has opened a novel avenue for directed chemical patterning of multi-component self-assembled films. The multilayers themselves are interesting complex nanometer-scale materials; studies are underway to understand and to manipulate their formation and electrical properties. We continue to push this technology toward architectures relevant for device fabrication; these techniques will be discussed. @FootnoteText@ @footnote 1@ A. Hatzor and P.S. Weiss, Science 291, 1019 (2001).@footnote 2@ M. E. Anderson et al., Journal of Vacuum Science and Technology B 20, 2739 (2002).@footnote 3@ M. E. Anderson et al., Journal of Vacuum Science and Technology B 21, 3116 (2003).@footnote 4@ M. E. Anderson et al., MicroElectronic Engineering, in press.