AVS 52nd International Symposium
    Nanometer-Scale Science and Technology Tuesday Sessions
       Session NS-TuP

Paper NS-TuP9
Characteristic of Carbon Nanotubes Synthesized by Pin-to-Plate Type Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition at Low Temperature

Tuesday, November 1, 2005, 4:00 pm, Room Exhibit Hall C&D

Session: Nanometer Scale Science and Technology Poster Session
Presenter: S.-J. Kyung, Sungkyunkwan University, Korea
Authors: S.-J. Kyung, Sungkyunkwan University, Korea
J.H. Lee, Sungkyunkwan University, Korea
C.-W. Kim, Sungkyunkwan University, Korea
M. Voronko, Sungkyunkwan University, Korea
G.Y. Yeom, Sungkyunkwan University, Korea
Correspondent: Click to Email
In this study, carbon nanotubes (CNTs) were grown on glass substrates coated with NiCr by an atmospheric pressure plasma enhanced chemical vapor deposition and their structural and electrical characteristics were investigated as a possible application to the field emitter of field emission display (FED) devices. NH3 gas flow rate (150sccm~ 270sccm) in He/C2H2/NH3 and the substrate temperature (400~500ï,°C) were varied and the increase of NH3 flow rate to 270sccm and the increase of growth temperature to 500ï,°C increased the length of the grown CNTs and decreased the diameter of the CNTs. The ratio of defective carbon peak to graphite carbon peak of the CNTs grown at 500ï,°C with 270sccm of NH3 measured by fourier transform(FT)-Raman was 0.772. When field emission properties were measured, the turn-on field was 3.5V/um and the emission field at 1mA/cm2 was 5.25V/ um.