AVS 52nd International Symposium
    Nanometer-Scale Science and Technology Tuesday Sessions
       Session NS-TuP

Paper NS-TuP15
Fabrication of Three-Dimensional Nanostructures with a Resolution of 10 nm and Selective Attachment of Biological Molecules using Scanning Near-field Photolithography

Tuesday, November 1, 2005, 4:00 pm, Room Exhibit Hall C&D

Session: Nanometer Scale Science and Technology Poster Session
Presenter: R.E. Ducker, University of Sheffield, UK
Authors: R.E. Ducker, University of Sheffield, UK
M. Montague, University of Sheffield, UK
G.J. Leggett, University of Sheffield, UK
Correspondent: Click to Email
Scanning near-field photolithography (SNP) is a new nanolithography tool in which a scanning near-field optical microscope (SNOM) coupled to a UV laser is used to pattern organic monolayers. Here we present a detailed study of the mechanism of formation of nanostructures in self-assembled monolayers (SAM) of alkanethiols adsorbed on gold surfaces. A novel mild etch solution has been developed that can be used to selectively etch gold using a SAM resist. Used in conjunction with SNP this enables the fabrication of structures in gold that are smaller than 10 nm using light with a wavelength of 244 nm. In contrast to electron beam methods, SNP may be used under ambient or even fluid conditions. SNP can also be used to create biological nanostructures via a variety of methods.