AVS 52nd International Symposium
    Nanometer-Scale Science and Technology Tuesday Sessions
       Session NS-TuP

Paper NS-TuP10
A Method of Coating and Implanting Carbon Nanotube with Iron Nanoparticles by Inductively Coupled Plasma

Tuesday, November 1, 2005, 4:00 pm, Room Exhibit Hall C&D

Session: Nanometer Scale Science and Technology Poster Session
Presenter: J.S. Kim, Chungang University, Korea
Authors: J.S. Kim, Chungang University, Korea
G.H. Kim, Chungang University, Korea
C.I. Kim, Chungang University, Korea
O.J. Yoon, Chungang University, Korea
J.K. Jung, Chungang University, Korea
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We describe a new method of coating and implanting Single-Walled Carbon Nanotube with Iron Pentacarbonyl(FeCo@sub 5@) using Inductively Coupled Plasma(ICP). We control the pressure of chamber by hydrogen gas. First, Iron Pentacarbonyl(FeCo@sub 5@) in bubbler was evaporated by heating. Second, Plasma treatment process was performed with hydrogen gas and the evaporated Iron Pentacarbonyl(FeCo@sub 5@), at rf-bias voltage. The result of this work shows Fe nanoparticles coated and implanted on Single Walled Carbon Nanotube(SWCNT). The morphology and structure was investigated by scanning electron microscopy (SEM), transmission electron microscory(TEM), and energy dispersive x-ray(EDX).