AVS 52nd International Symposium
    Electronic Materials and Processing Tuesday Sessions
       Session EM-TuP

Paper EM-TuP29
The Characteristics of ZnO:Al Film Using Reactive Magnetron Sputtering System for Touch Screen Applications

Tuesday, November 1, 2005, 4:00 pm, Room Exhibit Hall C&D

Session: Electronic Materials and Processing Poster Session
Presenter: H.S. Jeong, ITM Inc., Korea
Authors: H.S. Jeong, ITM Inc., Korea
M.G. Kim, ITM Inc., Korea
Y.W. Seo, ITM Inc., Korea
S.J. Kwon, Kyungwon University, Korea
Correspondent: Click to Email
The ZnO:Al (AZO) films deposited on glass for touch screen panels were prepared by in-line reactive magnetron sputtering system. The target materials of magnetron sputtering system were ceramic ZnO:Al@sub2@O@sub3@ and metallic Zn:Al targets. We applied the dc-pulsed power to the targets with the change of duty ratio. To compare the AZO thin film properties with respect to the properties of typical ITO thin film used in touch screen panels, we also prepared ITO films on glass using the in-line reactive magnetron sputtering system and commercial ITO coated glass for touch screen panels. We analyze the electrical and optical characteristics of the AZO and ITO coated glass, and the environmental endurance properties (high-low temperature, temperature/humidity test, etc) of the touch screen panels (4-wire resistive type) made with the AZO and ITO coated glass. The typical range of electrical resistance and optical transmittance of the AZO and ITO coated glass were 400~500@ohm@/Sqr and about 92%, respectively. The electrical and optical properties of the films were measured with a surface profiler, an UV/Visible spectrophotometer, a 4-point probe, X-ray diffraction spectroscopy, and atomic force microscopy. @FootnoteText@ This work was supported by the Ministry of Commerce, Industry and Energy of the Republic of Korea through the National Research Laboratory program.