AVS 52nd International Symposium
    Applied Surface Science Monday Sessions
       Session AS-MoP

Paper AS-MoP5
Thickness Measurement Of Diamond-Like Carbon (DLC) By Auger Electron Spectroscopy (AES)

Monday, October 31, 2005, 5:00 pm, Room Exhibit Hall C&D

Session: Aspects of Applied Surface Science Poster Session
Presenter: B. Lu, Seagate Technology (RMO) Ltd
Authors: Y. Zheng, Seagate Technology (RMO) Ltd
B. Lu, Seagate Technology (RMO) Ltd
G. Selvaduray, San Jose State University
Correspondent: Click to Email
Abstract-To increase the density of magnetic recoding disks and to protect the magnetic layers from sliding contact and corrosion, it is important to be able to accurately measure the thickness of DLC films. The ability to use AES to measure the DLC thickness on magnetic recording disks was studied. The principle of DLC thickness measurement was based on Beer-Lambert's law. The approach was to construct a working curve by using the thickness of DLC measured by ESCA and the intensities of the carbon and cobalt signals detected by AES to generate the calibration parameter " ". This study demonstrated that the DLC thickness could be measured by AES, employing the intensities of the cobalt signal present in the magnetic layer. Statistical analyses verified that there were no significant differences between the DLC thickness measured by ESCA and those measured by AES.