AVS 51st International Symposium | |
Vacuum Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
8:20am | VT-WeM1 Invited Paper Ultra Cleaning Techniques and Their Use in Vacuum Technology P.H. LaMarche, Princeton University |
9:40am | VT-WeM5 Invited Paper Contamination Control in PECVD Processes B. Shin, Y. Uritsky, Applied Materials, T. Gessert, J.P. Benner, National Renewable Energy Laboratory, R. Childers, H.S. Ryu, Hynix |
10:40am | VT-WeM8 Pressure Compensation for a Radiation-Induced Current Caused in a Vacuum Gauge Cable in the SPring-8 Storage Ring T. Magome, H. Saeki, Japan Synchrotron Radiation Research Institute, Japan |
11:00am | VT-WeM9 Development of Horizontal NEG Coating Cathode for Long Accelerator Beam Tubes D. Weiss, H.C. Hseuh, R. Todd, P. He, Brookhaven National Laboratory |
11:40am | VT-WeM11 Slip Fluid Model of a Holweck Vacuum Pump in the Viscous and Transition Regime S. Giors, Varian S.p.A., Italy, F. Subba, R. Zanino, Dipartimento di Energetica, Italy |