AVS 51st International Symposium
    Thin Films Tuesday Sessions

Session TF+NS-TuA
Focused Beam Processing & Fabrication

Tuesday, November 16, 2004, 1:20 pm, Room 303C
Moderator: J.M. Fitz-Gerald, University of Virginia


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:20pm TF+NS-TuA4
Localized Heating Effects During Electron Beam-Induced Deposition of Nanostructures
S. Randolph, J.D. Fowlkes, P.D. Rack, University of Tennessee, Knoxville
2:40pm TF+NS-TuA5 Invited Paper
Electron Beam Micromachining
P.E. Russell, D.P. Griffis, A. Garetto, NC State University
3:20pm TF+NS-TuA7
Nanoscale Structures and Devices Produced Using Energetic Atomic Beams
E.A. Akhadov, Los Alamos National Laboratory, D. Read, Florida State University, A.S. Cavanagh, A.H. Mueller, Los Alamos National Laboratory, J.C. Gregory, G.P. Nordin, University of Alabama in Huntsville, M.A. Hoffbauer, Los Alamos National Laboratory
3:40pm TF+NS-TuA8
A Three - Dimensional Computer Simulation of Electron - Beam Induced Deposition (EBID)
J.D. Fowlkes, P.D. Rack, S. Randolph, University of Tennessee, Knoxville