The effects of industrial processing atmospheres on the operating components of a number of vacuum gauge sensor technologies are presented. Each common type of vacuum gauge sensor is evaluated with respect to its functional components. The gauges considered are hot cathode ionization gauges, cold cathode ionization gauges, various material diaphragm gauges, and thermal conductivity gauges. The mechanisms evaluated with respect to the gauge internal electrodes/sensors are erosion, chemical interaction, metallurgical interactions, and deposits. Some of these component problems will be addressed with possible solutions.