AVS 51st International Symposium
    Plasma Science and Technology Thursday Sessions
       Session PS-ThM

Paper PS-ThM9
Line Plasma Generation of Microwave Employing Narrow Width Waveguide

Thursday, November 18, 2004, 11:00 am, Room 213A

Session: Atmospheric and Microdischarges
Presenter: H. Shindo, Tokai University, Japan
Authors: T. Fukasawa, Tokai University, Japan
S. Fujii, ADTEC Plasma Technology Co., Ltd., Japan
H. Shindo, Tokai University, Japan
Correspondent: Click to Email
Line plasma over 40 cm in length has been required for large area plasma processing at relatively higher pressure or atmospheric pressure. The line plasma will be applied to surface treatment of rolled organic thin film; furthermore, processing of large area flat panel such as large area LCD. The width of conventional rectangular waveguide is about 10 cm, therefore wavelength(@lambda@g) in the waveguide is about 15cm. However, the @lambda@g is increased with the decrease of the width of the waveguide. @lambda@g = @lambda@/@sr@(1-@lambda@/2W)@super 2@. @lambda@ is wave length in free space and W is width of the waveguide. We manufactured very narrow rectangular waveguide, whose inner widths are 63.5mm, 61.8mm and 61.5mm, respectively. Length and inner thickness of the waveguide are 500mm and 5mm respectively. 2.45 GHz microwave was introduced to the narrow waveguide through TE mode rectangular waveguide (BRJ-2), three-stub tuner and rectangular tapered waveguide. Electric field in the narrow waveguide was measured using electric probe. Measured @lambda@g was corresponded to the above-mentioned formula. @lambda@g was over 1m at the waveguide width of 61.5mm. A slit was made on the side of the wave-guide of 400mm in length and 1mm in width. A quartz tube was set on the slit, whose inner diameter and outer diameter were 3mm and 4mm, respectively. Length of the quartz tube was 400mm. He gas was introduced into the quartz tube. Pressure was measured by capacitance manometer. At the microwave power of 200W, some sections were observed corresponding to wavelength of microwave in free space. At the microwave power of 1kW, however, uniform optical emission intensity was achieved. Optical emission spectrum (OES) intensity at the wavelength of 656nm was measured in order to measure the distribution of electron density in the quartz tube. At the microwave power of 1kW, uniformity of the OES intensity was +-8.4%.