AVS 51st International Symposium | |
Electronic Materials and Processing | Monday Sessions |
Session DI-MoA |
Session: | High-k Dielectrics: Electronic Properties |
Presenter: | C.-G. Wang, ASM America Inc. |
Authors: | C.-G. Wang, ASM America Inc. H. Velasco, ASM America Inc. M. Verghese, ASM America Inc. E. Shero, ASM America Inc. G. Wilk, ASM America Inc. J.W. Maes, ASM International, Belgium O. Laitinen, ASM International, Belgium W. Deweerd, IMEC, Belgium A. Delabie, IMEC, Belgium R.L. Opila, University of Delaware A. Mathew, University of Delaware K. Demirkan, University of Delaware J. Morais, Universidade Federal do Rio Grande do Sol, Brazil I.J.R. Baumvol, Universidade Federal do Rio Grande do Sol, Brazil |
Correspondent: | Click to Email |