Characteristic X-ray emission result from ion/solid interactions, and is the basis for the well known analysis technique referred to as particle induced X-ray emission (PIXE). Characteristic X-rays may be emitted by either bombardment by MeV protons or heavy ions of a few keV. The advantage to heavy ions is that the X-ray yield is confined to a narrow region near the surface. Since the stopping power for < 30 keV Ga+ ions may be orders of magnitude greater than the stopping power for < 30 keV electrons, the acquisition of characteristic X-rays from regions containing both excellent spatial resolution and excellent depth resolution using a focused ion beam (FIB) instrument rather than a scanning electron microscope (SEM) as the primary source are feasible. An additional advantage of heavy ion induced X-ray emission over electron induced X-ray emission is that the Bremsstrahlung is orders of magnitude lower. Thus, ion induced X-ray spectra provides for superior peak to noise ratios, and therefore, offers the possibility for trace element sensitivity compared to electron induced X-ray emission via e.g., X-ray energy dispersive spectrometry (XEDS). In addition, the near surface ion/solid interactions also allow for the possibility of surface analysis via FIB induced X-ray analysis (FIBIX). An added advantage of the FIBIX technique is its sensitivity to soft X-rays, and therefore, light elemental analysis.