AVS 50th International Symposium
    Vacuum Technology Thursday Sessions

Session VT-ThA
Industrial Vacuum Applications

Thursday, November 6, 2003, 2:00 pm, Room 323
Moderator: N.T. Peacock, MKS Instruments


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm VT-ThA1 Invited Paper
The Role of Outgasssing, Outdiffusion and Desorption in Vacuum Coating
D.M. Mattox, Management Plus Inc.
2:40pm VT-ThA3
Pumping Characteristics of Metal Films in a Vacuum Glass Vessel: Experimental and Theoretical Issues
A. Bonucci, C. Carretti, G. Longoni, R. Giannantonio, M. Urbano, SAES Getters SpA, Italy
3:00pm VT-ThA4 Invited Paper
Vacuum Thermal Insulation - Inventions for the Future
V. Nemanic, Jozef Stefan Institute, Slovenia
3:40pm VT-ThA6
A Comparison of Chamber Conductance Calculations Using CFD and a Thermal Radiation Analogy
L.A. Gochberg, Novellus Systems
4:00pm VT-ThA7
CFD Analysis of a 2D Model of a Gaede Drag Pump in Viscous and Slip Flow Regime
S. Giors, Varian Vacuum Technology, Italy, F. Subba, Politecnico di Torino, Italy
4:20pm VT-ThA8
Characteristics Evaluation Practice of Predictable Performance Monitoring for Low Vacuum Dry Pumps in the Semiconductor Production Line
J.Y. Lim, W.S. Cheung, Korea Research Institute of Standards and Science, J.H. Joo, Sungwon Edwards Ltd., Korea, Y.W. Kim, Samsung Electronics Co. Ltd., Korea, W.G. Sim, Hannam University, Korea, K.H. Chung, Korea Research Institute of Standards and Science
4:40pm VT-ThA9
An Alternative-voltage Penning Cell for Low-voltage Vacuum Gauges and Other Applications
S.A. Cherenshchykov, National Science Centre "Kharkov Institute of Physics and Technology", Ukraine