AVS 50th International Symposium | |
Vacuum Technology | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
2:00pm | VT-ThA1 Invited Paper The Role of Outgasssing, Outdiffusion and Desorption in Vacuum Coating D.M. Mattox, Management Plus Inc. |
2:40pm | VT-ThA3 Pumping Characteristics of Metal Films in a Vacuum Glass Vessel: Experimental and Theoretical Issues A. Bonucci, C. Carretti, G. Longoni, R. Giannantonio, M. Urbano, SAES Getters SpA, Italy |
3:00pm | VT-ThA4 Invited Paper Vacuum Thermal Insulation - Inventions for the Future V. Nemanic, Jozef Stefan Institute, Slovenia |
3:40pm | VT-ThA6 A Comparison of Chamber Conductance Calculations Using CFD and a Thermal Radiation Analogy L.A. Gochberg, Novellus Systems |
4:00pm | VT-ThA7 CFD Analysis of a 2D Model of a Gaede Drag Pump in Viscous and Slip Flow Regime S. Giors, Varian Vacuum Technology, Italy, F. Subba, Politecnico di Torino, Italy |
4:20pm | VT-ThA8 Characteristics Evaluation Practice of Predictable Performance Monitoring for Low Vacuum Dry Pumps in the Semiconductor Production Line J.Y. Lim, W.S. Cheung, Korea Research Institute of Standards and Science, J.H. Joo, Sungwon Edwards Ltd., Korea, Y.W. Kim, Samsung Electronics Co. Ltd., Korea, W.G. Sim, Hannam University, Korea, K.H. Chung, Korea Research Institute of Standards and Science |
4:40pm | VT-ThA9 An Alternative-voltage Penning Cell for Low-voltage Vacuum Gauges and Other Applications S.A. Cherenshchykov, National Science Centre "Kharkov Institute of Physics and Technology", Ukraine |