AVS 50th International Symposium
    Thin Films Thursday Sessions

Session TF-ThM
Modeling & Fundamentals in Thin Film Deposition

Thursday, November 6, 2003, 8:20 am, Room 329
Moderator: M.C.M. van de Sanden, Eindhoven University of Technology, The Netherlands


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am TF-ThM1
Mechanisms and Energetics of H Insertion into Si-Si Bonds in Hydrogenated Amorphous Silicon Films
S. Sriraman, M.S. Valipa, E.S. Aydil, University of California, Santa Barbara, D. Maroudas, University of Massachusetts
8:40am TF-ThM2
Effect of Crosshatch Formation on the Kinetics of Si@sub 1-x@Ge@sub x@ Growth on Si(001) from Hydride Precursors
T. Spila, University of Illinois, P. Desjardins, École Polytechnique de Montréal, Canada, J. D'Arcy-Gall, R.D. Twesten, J.E. Greene, University of Illinois
9:00am TF-ThM3
Initial Growth of High Rate Deposited Silicon Thin Films Studied by In-situ Spectroscopic Ellipsometry and Attenuated Total Reflection Infrared Spectroscopy
P.J. Van den Oever, I.J. Houston, J. Hong, M.C.M. van de Sanden, W.M.M. Kessels, Eindhoven University of Technology, The Netherlands
9:20am TF-ThM4
Sn-mediated Ge/Ge(001) Growth by Low-temperature Molecular Beam Epitaxy: Effects on Surface Roughening and Epitaxial Thickness
K.A. Bratland, Y.L. Foo, T. Spila, University of Illinois, P. Desjardins, École Polytechnique de Montréal, Canada, J.E. Greene, University of Illinois
9:40am TF-ThM5 Invited Paper
Understanding Radical-Surface Interactions in the Plasma-Assisted Deposition of Amorphous Hydrogenated Silicon
S. Agarwal, S. Sriraman, Univ. of California, Santa Barbara, A. Takano, Fuji Electric Corp. R&D, Ltd., Japan, M.C.M. van de Sanden, Eindhoven Univ. of Tech., The Netherlands, D. Maroudas, Univ. of Massachusetts - Amherst, E.S. Aydil, Univ. of California, Santa Barbara
11:00am TF-ThM9
From Ab-initio Modeling to Experimental Thin Film Synthesis of a Novel Boron-oxygen-yttrium Phase
D. Music, V. Chirita, Linköping University, Sweden, J.M. Schneider, RWTH Aachen, Germany, U. Helmersson, Linköping University, Sweden
11:20am TF-ThM10
Low Temperature Nitride and Oxide Thin Film Growth using an Energetic Atom Source
A.H. Mueller, E.A. Akhadov, M.A. Hoffbauer, Los Alamos National Laboratory
11:40am TF-ThM11
Physical Self-assembly and the Nucleation of 3D Nanostructures by Oblique Angle Deposition@footnote 1@
T. Karabacak, G.-C. Wang, T.-M. Lu, Rensselaer Polytechnic Institute