| AVS 50th International Symposium | |
| Microelectromechanical Systems (MEMS) | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| MM-TuP1 Electrostatic Actuation in BioMEMS T.L. Sounart, T.A. Michalske, Sandia National Laboratories |
| MM-TuP2 Capillary Electrophoresis On-chip: Glass and Polymeric Materials for Cell Fabrication Y. Mourzina, A. Offenhaeusser, Research Centre Juelich, Germany |
| MM-TuP3 Stiction Measurements Made with an Atomic Force Microscope on Test Structures Mounted with Various Die-Attach Materials E.J. Thoreson, Worcester Polytechnic Institute, J. Martin, Analog Devices, N.A. Burnham, Worcester Polytechnic Institute |
| MM-TuP4 Vacuum Encapsulation of Micron-Sized Vacuum Field Emission Triodes S.J. Randolph, University of Tennessee, Knoxville, M.A. Guillorn, University of Tennessee, Knoxville and Oak Ridge National Lab, M.D. Hale, P.D. Rack, University of Tennessee, Knoxville |
| MM-TuP5 Investigation on Metal-coated Nano-aperture Array D.W. Kim, J.T. Ok, S.S. Choi, Sun Moon University, Korea, J.W. Kim, J.H. Boo, Sungkyunkwan University, Korea, C.K. Chun, Sun Moon University, Korea, J.S. Yang, Myongji University, Korea |