| AVS 50th International Symposium | |
| Microelectromechanical Systems (MEMS) | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MM-TuM1 Invited Paper MEMS and NEMS from Chemical Vapor Deposited Nanodiamond Materials J.E. Butler, Naval Research Laboratory |
| 9:00am | MM-TuM3 Engineering the Surface Properties of Ultrananocrystalline Diamond for High-Performance MEMS Devices A.V. Sumant, D.S. Grierson, University of Wisconsin, Madison, J.E. Gerbi, J.A. Carlisle, O. Auciello, Argonne National Laboratory, R.W. Carpick, University of Wisconsin, Madison |
| 9:20am | MM-TuM4 AlN-based MEMS and NEMS Resonator Devices A.E. Wickenden, L.J. Currano, M. Dubey, U.S. Army Research Laboratory, S. Hullavarad, R.D. Vispute, University of Maryland, College Park |
| 9:40am | MM-TuM5 Anchor Optimization for Quality Factor Improvement in Microresonators L.J. Currano, A.E. Wickenden, M. Dubey, U.S. Army Research Laboratory |
| 10:00am | MM-TuM6 Chemical Control of Mechanical Energy Dissipation in Micromechanical Silicon Resonators Y. Wang, J.A. Henry, M.A. Hines, Cornell University |
| 10:20am | MM-TuM7 Vapor-Phase Lubricants: Nanometer-scale Lubrication Mechanisms and Uptake on Silicon W. Neeyakorn, M.R. Varma, J. Krim, North Carolina State University |
| 10:40am | MM-TuM8 Can We Predict Friction and Wear in MEMS? E.E. Flater, University of Wisconsin - Madison, A.D. Corwin, M.P. DeBoer, Sandia National Laboratories, C.K. Bora, M.E. Plesha, R.W. Carpick, University of Wisconsin - Madison |
| 11:00am | MM-TuM9 Nanomechanical Characterization of Digital Micromirror Devices G. Wei, B. Bhushan, The Ohio State University, J. Jacobs, Texas Instruments, Inc. |
| 11:20am | MM-TuM10 Measurement of Mechanical Properties of Silicon Nitride Thin Film at Cryogenic Temperatures W. Chuang, T. Luger, University of Maryland, College Park, R. Fettig, NASA Goddard Space Flight Center, R. Ghodssi, University of Maryland, College Park |
| 11:40am | MM-TuM11 Pointwise Strain Mapping a Multilayer MEMS Mirror Using Synchrotron Radiation Y.N. Picard, S.M. Yalisove, E. Dufresne, C. Cionca, J. Guzman, R. Clarke, University of Michigan, Ann Arbor, D. Walko, Argonne National Laboratory, O.B. Spahn, D.P. Adams, Sandia National Laboratories |