AVS 50th International Symposium
    Microelectromechanical Systems (MEMS) Tuesday Sessions
       Session MM-TuM

Invited Paper MM-TuM1
MEMS and NEMS from Chemical Vapor Deposited Nanodiamond Materials

Tuesday, November 4, 2003, 8:20 am, Room 320

Session: Development and Characterization of MEMS and NEMS Materials
Presenter: J.E. Butler, Naval Research Laboratory
Correspondent: Click to Email
Nanodiamond films grown by chemical vapor deposition exhibit a number of remarkable properties desirable for MEMS and NEMS. These include high Young's Modulus, thermal diffusivity, dielectric breakdown strength, mass density, secondary electron yields, fracture toughness, optical transparency, corrosion resistance, biological stability, and more. The nucleation, growth, and doping of these films on diverse substrate materials, including Si, poly Si, SiO2, and various metals, will be described along with various methods of processing into structures and devices.