AVS 50th International Symposium
    Thin Films Wednesday Sessions
       Session TF-WeP

Paper TF-WeP30
Mechanical Properties of Ultranano-, Nano- and Poly-crystalline Diamond Films and Membranes

Wednesday, November 5, 2003, 11:00 am, Room Hall A-C

Session: Poster Session
Presenter: A. Moon, Michigan State University and Fraunhofer Center for Coatings and Laser Applications
Authors: A. Moon, Michigan State University and Fraunhofer Center for Coatings and Laser Applications
T.A. Grotjohn, Michigan State University and Fraunhofer Center for Coatings and Laser Applications
M.K. Yaran, Fraunhofer Center for Coatings and Laser Applications
T. Schuelke, Fraunhofer Center for Coatings and Laser Applications
D.K. Reinhard, Michigan State University and Fraunhofer Center for Coatings and Laser Applications
J. Asmussen, Michigan State University and Fraunhofer Center for Coatings and Laser Applications
Correspondent: Click to Email
The mechanical properties of polycrystalline materials can vary substantially depending on the material’s grain size, surface morphology and grain boundary properties. In the case of diamond films the crystal grain size and surface morphology can range from ultrananocrystalline (grain sizes of less than 10nm) to nanocrystalline (grain sizes of 10’s nm) to polycrystalline (grain sizes of 100’s nm to microns). The Young’s modulus of films and the deflection characteristics and fracture strength of membranes are characterized in this study for a range of diamond films/membranes deposited with grain sizes ranging from ultrananocrystalline to polycrystalline. The Young’s modulus of diamond films with thickness from 0.1 µmm to 2 µmm is measured on the substrate by using a pulsed laser to generate surface acoustic wave which are evaluated by Fourier analysis. The Young’s modulus and membrane deflection characteristics are characterized as function of the thickness of the film, film nucleation/seeding technique, grain size, surface morphology, and synthesis chemistry. Measured Young’s modulus values were as high as 900-1000 GPa.