AVS 50th International Symposium
    Thin Films Wednesday Sessions
       Session TF-WeP

Paper TF-WeP18
Deposition of ITO Film using the DLC Buffer Layer between Plastic Substrate and ITO Layer

Wednesday, November 5, 2003, 11:00 am, Room Hall A-C

Session: Poster Session
Presenter: M.G. Kim, ITM Inc., Korea
Authors: M.G. Kim, ITM Inc., Korea
H.S. Jeong, ITM Inc., Korea
Y.W. Seo, ITM Inc., Korea
Correspondent: Click to Email
Recently organic electro luminescence displays(OELD) using a plastic substrate such as PET and PES are emerging as a strong new candidate for flat panel displays. In this study we make diamond like carbon(DLC) films as a buffer layer between plastic substrate and transparent conducting oxide(TCO). The DLC is characterized by high hardness, flatness, and low gas permeability to moisture and oxygen. The unipolar pulse mode of the power supply(IBP1030, ITM, Inc.) was used on a graphite target, and the argon-methane mixed gas was used. Indium tin oxide films were deposited on the DLC buffer layer of the plastic substrate in a horizontal single ended in-line sputter system equipped with a pulsed dual magnetron sputter. Two ITO targets of In@sub2@O@sub3@(90 wt%):SnO@sub2@(10 wt%) were used. To understand the properties of the ITO films deposited by pulsed dual magnetron sputtering processes, we investigated the electrical resistivity, film structure, optical transmission, surface roughness, and gas permeability. @FootnoteText@ This work was supported by the Ministry of Science and Technology of the Republic of Korea through the National Research Laboratory program.