AVS 50th International Symposium
    Thin Films Wednesday Sessions
       Session TF-WeP

Paper TF-WeP10
Photocatalytic Related Properties and Structure of Titanium Oxide Films

Wednesday, November 5, 2003, 11:00 am, Room Hall A-C

Session: Poster Session
Presenter: C.B. Shiu, National Dong Hwa University, Taiwan, ROC
Authors: C.B. Shiu, National Dong Hwa University, Taiwan, ROC
M.C. Yang, National Dong Hwa University, Taiwan, ROC
T.S. Yang, National Dong Hwa University, Taiwan, ROC
M.S. Wong, National Dong Hwa University, Taiwan, ROC
Correspondent: Click to Email
Titanium dioxide (TiO2) films were prepared with ion-assisted electron-beam evaporation technique using rutile TiO2 powder as a source material. Various oxygen flows and ion bombardments were applied to adjust and to modify the composition and the structure of the growing films. Various characterization methods such as ellipsometry, Raman spectroscopy, UV-Visible spectroscopy, XRD, SEM, and TEM were used to measure the crystallinity, morphology, optical and mechanical properties of the films. The photocatalytic related properties under UV and visible lights were characterized by water-contact angle measurement, oxidation of methylene-blue solution, and reduction of Ag from AgCl solution. In general anatase TiO2 films exhibited overall the best photocatalytic performance. However, variations in thickness, composition, phase and crystallinity in the films made a difference in their catalytic behaviors. The effects of film processing parameters on the structure and properties of the oxides will be discussed.