AVS 50th International Symposium
    Advanced Surface Engineering Monday Sessions
       Session SE-MoA

Paper SE-MoA8
Nanotribological Properties of Nanocomposite and Amorphous CrBN Thin Films

Monday, November 3, 2003, 4:20 pm, Room 323

Session: Hard Coatings: Preparation, Properties, Wear, and Nanotribology
Presenter: D.M. Mihut, University of Nebraska, Lincoln
Authors: D.M. Mihut, University of Nebraska, Lincoln
J. Turner, University of Nebraska, Lincoln
T.P. Butler, University of Nebraska, Lincoln
S.M. Aouadi, Southern Illinois University
S.L. Rohde, University of Nebraska, Lincoln
Correspondent: Click to Email
Thin films with nanocomposite and/or amorphous CrBN structures can be successfully used for applications where high hardness, good wear resistance, low roughness and good corrosion resistance are required. CrBN films were deposited on to silicon substrates using reactive unbalanced magnetron sputtering. The deposition was monitored in-situ using spectroscopic ellipsometry. Films were characterized using X-Ray diffraction (XRD), atomic force microscopy (AFM), Auger electron spectroscopy (AES) and X-Ray photoelectron spectroscopy (XPS). Nanotribological behavior of CrBN thin films with differing composition were studied using a Hysitron Triboscope in conjunction with an AFM. Microscratch measurements were carried out in both constant and ramped load modes, after which the wear tracks were imaged and measured using AFM. The failure modes were also investigated using scanning electron microscopy (SEM). The measured friction coefficient, residual wear depth, and percent elastic recovery were compared for CrBN films of differing deposition conditions to begin to develop an understanding of process-property relationships in these new materials.