AVS 50th International Symposium
    Advanced Surface Engineering Monday Sessions
       Session SE-MoA

Paper SE-MoA7
Fabrication and Properties of Ultra-nano, Nano, and Polycrystalline Diamond Membranes and Sheets

Monday, November 3, 2003, 4:00 pm, Room 323

Session: Hard Coatings: Preparation, Properties, Wear, and Nanotribology
Presenter: D.K. Reinhard, Michigan State University and Fraunhofer Center for Coating and Laser Applications
Authors: D.K. Reinhard, Michigan State University and Fraunhofer Center for Coating and Laser Applications
M. Becker, Fraunhofer Center for Coating and Laser Applications
R.A. Booth, Michigan State University and Fraunhofer Center for Coating and Laser Applications
T.P. Hoepfner, Michigan State University
T.A. Grotjohn, Michigan State University and Fraunhofer Center for Coating and Laser Applications
J. Asmussen, Michigan State University and Fraunhofer Center for Coating and Laser Applications
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Thin diamond membranes and free-standing sheets are of interest for a variety of potential applications. One such application is the motivation of this research, i.e. achieving diamond electron-stripping foils for use in heavy ion (1 - 11 MeV total energy) accelerators.@footnote 1@ The objective of this research is to produce large area free-standing foils/membranes of diamond. Stripping foils have areas of approximately 1 cm by 1 cm and thickness of approximately 1 µm. They must be positioned and mounted to a metal frame, supported on three sides. This paper describes the film nucleation, synthesis, and subsequent fabrication steps required to make large area free-standing diamond foils. Films are deposited on silicon wafers as ultra-nano (10 nm or less grain size), nanocrystalline (100 nm grain size), and as polycrystalline (micrometer grain size) diamond by varying gas composition, nucleation, power, substrate temperature, growth rate, and pressure. Large area foils are fabricated from each of these film types. Subsequently the diamond is separated from the substrate and mounted as a supported foil. Mechanical properties of the foils before and after mounting are described as a function of film morphology and thickness (0.5 µm to 5 µm). Examples of stripping foils and associated frames are presented. @FootnoteText@ @footnote 1@ C. J. Liaw, Y. Y. Lee, and J. Tuozzolo, "Lifetime of Carbon Stripping Foils for the Spallation Neutron Source, Proceedings of the 2001 Particle Accelerator Conference, Chicago, (2001), 1538.