AVS 50th International Symposium
    Applied Surface Science Monday Sessions
       Session AS-MoM

Paper AS-MoM7
Interfacial Analysis between Amorphous Carbon Films and Glass by XPS and Improvement of Adhesion Strength at the Interface by Plasma Treatment

Monday, November 3, 2003, 10:20 am, Room 324/325

Session: Practical Surface Science
Presenter: S. Takeda, Asahi Glass Co., Ltd, Japan
Authors: S. Takeda, Asahi Glass Co., Ltd, Japan
S. Suzuki, Asahi Glass Co., Ltd, Japan
Correspondent: Click to Email
Amorphous carbon (a-C) films are widely applied in data storage and microelectronic industries because of their unique properties such as excellent hardness, good wear resistance, low friction coefficient, good chemical resistance and high electrical and thermal conductivities etc. However, in case of deposition of the a-C films onto glass, adhesion strength of the films to glass substrate is very poor and the film is easily delaminated at the interface between the film and glass. This is a serious problem for practical applications. Namely, improvement of the adhesion strength is a key issue to apply the a-C films to practical products. In order to overcome this problem, we investigated the effects of plasma treatment in Ar, N2 and O2 prior to the film deposition on the adhesion strength of the films to glass substrate. In the presentation, we report a major factor governing the adhesion strength based on the interfacial analysis between the a-C films and glass by X-ray photoelectron spectroscopy.