AVS 49th International Symposium
    Vacuum Technology Wednesday Sessions

Session VT-WeA
Vacuum Measurements, Components, and Control

Wednesday, November 6, 2002, 2:00 pm, Room C-104
Moderator: P.C. Arnold, Helix Technology, Inc.


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm VT-WeA1 Invited Paper
Eight Unconventional Gauges: A User's Impressions
B.R.F. Kendall, Elvac Laboratories
2:40pm VT-WeA3
The Effect of Ambient Temperature on the Sensitivity of Hot-Cathode Ionization Gauges
P. Abbott, National Institute of Standards and Technology, P. Mohan, National Physical Laboratory, India
3:00pm VT-WeA4
The Method of Calibrating and Adjusting Sensitivity of Mass Spectrometer
Y. Feng, D.T. Li, D.X. Zhang, Lanzhou Institute of Physics, P.R. China
3:20pm VT-WeA5 Invited Paper
Using DeviceNet for Improved Vacuum Monitoring
C.E. Karlsen, Lawrence Livermore National Laboratory
4:00pm VT-WeA7
Closed Loop Process Control for Reactive Sputter Deposition of Dielectric Films
D. Carter, H. Walde, G. McDonough, G.A. Roche, Advanced Energy Industries
4:20pm VT-WeA8
Soft LaserBellows
D.U. Chang, LaserTech USA
4:40pm VT-WeA9
An Ultra-sensitive Leak Detection and Calibration System
Ping Chen, Xu Chen, Q. Jin, Liangzhen Cha, Tsinghua University, P.R. China
5:00pm VT-WeA10
A Compact Leak Rate Calibration System for Both Pressure and Vacuum Modes
Xu Chen, Ping Chen, Q. Zhang, Q. Liu, Liangzhen Cha, Tsinghua University, P.R. China