AVS 49th International Symposium | |
Vacuum Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
2:00pm | VT-WeA1 Invited Paper Eight Unconventional Gauges: A User's Impressions B.R.F. Kendall, Elvac Laboratories |
2:40pm | VT-WeA3 The Effect of Ambient Temperature on the Sensitivity of Hot-Cathode Ionization Gauges P. Abbott, National Institute of Standards and Technology, P. Mohan, National Physical Laboratory, India |
3:00pm | VT-WeA4 The Method of Calibrating and Adjusting Sensitivity of Mass Spectrometer Y. Feng, D.T. Li, D.X. Zhang, Lanzhou Institute of Physics, P.R. China |
3:20pm | VT-WeA5 Invited Paper Using DeviceNet for Improved Vacuum Monitoring C.E. Karlsen, Lawrence Livermore National Laboratory |
4:00pm | VT-WeA7 Closed Loop Process Control for Reactive Sputter Deposition of Dielectric Films D. Carter, H. Walde, G. McDonough, G.A. Roche, Advanced Energy Industries |
4:20pm | VT-WeA8 Soft LaserBellows D.U. Chang, LaserTech USA |
4:40pm | VT-WeA9 An Ultra-sensitive Leak Detection and Calibration System Ping Chen, Xu Chen, Q. Jin, Liangzhen Cha, Tsinghua University, P.R. China |
5:00pm | VT-WeA10 A Compact Leak Rate Calibration System for Both Pressure and Vacuum Modes Xu Chen, Ping Chen, Q. Zhang, Q. Liu, Liangzhen Cha, Tsinghua University, P.R. China |