AVS 49th International Symposium
    Vacuum Technology Wednesday Sessions
       Session VT-WeA

Paper VT-WeA4
The Method of Calibrating and Adjusting Sensitivity of Mass Spectrometer

Wednesday, November 6, 2002, 3:00 pm, Room C-104

Session: Vacuum Measurements, Components, and Control
Presenter: Y. Feng, Lanzhou Institute of Physics, P.R. China
Authors: Y. Feng, Lanzhou Institute of Physics, P.R. China
D.T. Li, Lanzhou Institute of Physics, P.R. China
D.X. Zhang, Lanzhou Institute of Physics, P.R. China
Correspondent: Click to Email
The mass spectrometer is used as a partial pressure gauge in many fields on vacuum, especially in monitoring and measurement of vacuum system. It is necessary to calibrate the parameters of the mass spectrometer in order to improve the accuracy during the pressure measurement. A vacuum system, Calibration apparatus of mass spectrometer for partial pressure analysis with dynamic flow method, has been established in our center, which can be used to calibrate some parameters of the mass spectrometer with one kind of gas or some kinds of mixed gases. In this paper, the principle of the system is introduced, and the method and results for calibrating the sensitivity of QMS422 which manufactured by BALZERS is given. In the process, we get the curve on the sensitivity change with the emit ion current, the cathode volts and the focus volts change. At last, the better method is recommended to make the mass spectrometer in the good measurement condition with the largest or the most stable sensitivity.