AVS 49th International Symposium
    Thin Films Friday Sessions

Session TF-FrM
Fundamentals of Thin Flm Growth

Friday, November 8, 2002, 8:20 am, Room C-101
Moderator: M.C.M. Van de Sanden, Eindhoven University of Technology


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Click a paper to see the details. Presenters are shown in bold type.

8:20am TF-FrM1 Invited Paper
Supersonic Molecular Beam Studies of Thin Film Nucleation and Growth
J.R. Engstrom, Cornell University
9:00am TF-FrM3
Mechanism for Epitaxial Breakdown during Low-temperature Ge(001) Molecular Beam Epitaxy
K.A. Bratland, Y.L. Foo, J.A.N.T. Soares, T. Spila, J. D'Arcy-Gall, University of Illinois, P. Desjardins, École Polytechnique de Montréal, Canada, J.E. Greene, University of Illinois
9:20am TF-FrM4
Si@sub 1-y@C@sub y@/Si(001) Gas-source Molecular Beam Epitaxy from Si@sub 2@H@sub 6@ and CH@sub 3@SiH@sub 3@: Surface Reaction Paths and Growth Kinetics
Y.L. Foo, K.A. Bratland, B. Cho, University of Illinois, P. Desjardins, École Polytechnique de Montréal, Canada, J.E. Greene, University of Illinois
9:40am TF-FrM5
In-Situ Infrared Chemometrics During BPSG Dielectric Thin Film Growth
L.D. Flores, J.E. Crowell, University of California, San Diego
10:00am TF-FrM6
Surface Chemistry of TaCl@sub 5@ on Polycrystalline Ta and Cu
A.M. Lemonds, J.M. White, J.G. Ekerdt, The University of Texas at Austin
10:20am TF-FrM7 Invited Paper
Theoretical Design of Thin Film Growth with Functional Properties
K.M.E. Larsson, Uppsala University, Sweden
11:00am TF-FrM9
Chemical Bonding Requirements for Forming Passive Semiconductor Oxide Interfaces
J.Z. Sexton, A.C. Kummel, University of California, San Diego
11:20am TF-FrM10
In-situ Observation of the Electron-Current Effect on Mass-Flow in Thin Ag Films on an Insulating Substrate@footnote 1@
O. Bondarchuk, M. Degawa, E.D. Williams, University of Maryland
11:40am TF-FrM11
Effect of Metal Underlayers on Low Temperature Silicon Growth
K. Xu, A. Pradhan, S.I. Shah, University of Delaware