AVS 49th International Symposium
    Electronic Materials and Devices Wednesday Sessions

Session EL+SS+SC-WeA
Semiconductor Film Growth and Oxidation

Wednesday, November 6, 2002, 2:00 pm, Room C-107
Moderator: R.K. Ahrenkiel, National Renewable Energy Laboratory


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm EL+SS+SC-WeA1
Scanning Tunneling Microscopy and Spectroscopy of Gallium Oxide and Indium Oxide Deposition on GaAs(001)-(2x4)
M.J. Hale, J.Z. Sexton, University of California, San Diego, S.I. Yi, Applied Materials, D.L. Winn, A.C. Kummel, University of California, San Diego
2:20pm EL+SS+SC-WeA2
Structure-Sensitive Oxidation of the Indium Phosphide (001) Surface
G. Chen, University of California, Los Angeles, S.B. Visbeck, Siemens & Shell Solar Gmbh, Germany, D.C. Law, University of California, Los Angeles, R.F. Hicks, University of California, Los Angeles; AVS fellow
2:40pm EL+SS+SC-WeA3 Invited Paper
The Addition of Sb and Bi 'Surfactants' during GaN Growth by Metal Organic Vapor Phase Epitaxy
T.F. Kuech, L. Zhang, H.F. Tang, J. Schieke, M. Mavrikakis, University of Wisconsin - Madison
3:20pm EL+SS+SC-WeA5
Surface Reaction Study of Tungsten Nitride Precursors Decomposition on Si(100)-(2 x 1)
Y.-W. Yang, Synchrotron Radiation Research Center, Taiwan, J.-B. Wu, Y.-F. Lin, H.-T. Chiu, National Chiao-Tung University, Taiwan
3:40pm EL+SS+SC-WeA6
Thermal Decomposition and Desorption Study of Tetrakis(diethylamido)zirconium(TDEAZr) on Si(100) for MOCVD and ALD of ZrO@sub 2@
K. Yong, J. Jeong, S. Lim, Pohang University of Science and Technology, Korea
4:00pm EL+SS+SC-WeA7
Reactions of Organosulfur Compounds with Si(100) for Chemically Controlled Epitaxy of II-VI Semiconductors on Si(100)
Z. Zhu, A. Srivastava, R.M. Osgood Jr., Columbia University
4:20pm EL+SS+SC-WeA8
Kinetics and Mechanism of Adsorption and Ultrathin Oxide Growth by Ozone on Si(100)2x1 and Si(111)7x7
K. Nakamura, A. Kurokawa, H. Nonaka, S. Ichimura, National Institute of Advanced Industrial Science and Technology (AIST), Japan
4:40pm EL+SS+SC-WeA9
Stress-induced Dissociative Chemisorption of Oxygen on Si(001)
M. Yata, Y. Uesugi-Saitow, National Institute for Materials Science, Japan
5:00pm EL+SS+SC-WeA10
Direct Detection of D@sub 2@O and D@sub 2@ on D/Si(111) Surfaces under O Atom Exposures
F. Rahman, F. Khanom, A. Aoki, S. Inanaga, A. Namiki, Kyushu Institute of Technology, Japan